Analytical comparison of circular diaphragm based simple, single and double touch mode – MEMS capacitive pressure sensor

Abstract

In this paper a comparative study is done between normal capacitive pressure sensor, a touch mode capacitive pressure sensor and a double touch mode capacitive pressure sensor. The diaphragm in use is of circular shape. The theory and underlying equations has been described for the said devices and then simulations have been done for different performance parameters to understand the advantage of one over the other.