Abstract
In this study, the electron energy distribution function in capacitively coupled radio frequency dry air discharge in three different regions along discharge tube was measured. It was observed that all regions do have Fermi electron energy distribution function which increases in magnitude with increasing the applied power, and decreasing with increasing the internal pressure. This function magnitude reaches its highest value near the powered electrode, while it decreases towards the earthed one.
Highlights
Radio frequency dischargeRF discharges were introduced in the 19th century when RF power generators with sufficient power became available
From the I-V characteristics of the single probe which was found in this research, we obtained the electron energy distribution function through calculating the second derivative of the ion current with respect to the probe potential, the plasma potential could be found
The change of electron energy distribution function with increased applied radio frequency power in pressure (5.0×10-4 m bar) near the positive electrode is shown in Fig. (12)
Summary
Radio frequency dischargeRF discharges were introduced in the 19th century when RF power generators with sufficient power became available. In conventional CCRF, a discharge plasma is generated by driving one electrode with a single RF power source, typically at 13.56 MHz (Lee et al, 2004). In this research we have used a single Langmuir probe as a simplest powerful tool for radio frequency discharge measurements.
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