Abstract
The photoluminescence (PL) spectra and kinetics of amorphous and crystalline silicon nanoclusters are investigated. The given nanoclusters are formed by thermal annealing of thin suboxide silicon films with different volume fractions of silicon. It is demonstrated that the PL intensity and lifetime of the ensembles of silicon nanocrystals have a steplike dependence on the silicon volume fraction in the film. The influence of the percolation effect on the photoluminescence properties of the structures under study is discussed.
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