Abstract
Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied softmagnetic material for microsensor applications is permalloy with a composition of NiFe81/19. This paper investigates the magnetic material properties as a function of the film thickness and a subsequent temperature treatment. For this the magnetic properties are measured with a Vibrating Sample Magnetometer (VSM) and for the investigation of the crystallographic structure a diffractometer is used.
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