Abstract
This paper examines the Shallow Bulk Acoustic Wave (SBAW) properties in singly rotated Y-cut berlinite. The rotation angles of the substrates lie in two regions near +40.5 and -64. were grown hydrothermally by the t ransport method. The temperature behavior of SBAW in berlinite was found to be different from that of quartz. quartz, the frequency-temperature curve exhibits a cubic behavior for substrates with e equal to -50.5. In berlinite, cubic behavior was found in the +40.5 substrate. The SBAW in +40.5 berl inite therefore combines good temperature stability with high wave velocity. Substrates with three different 8's in each of the two temperature stable regions were characterized in terms of wave velocity, coupling coefficient and temperature stability. Surface acoustic wave devices were also fabricated on the same substrates to provide additional information on the substrate quality. The result showed that for 1 imited temperature range (15C), the temperature stability of SBAW in berlinite can be comparable to that of SAW in ST quartz. The substrates
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