Abstract

Abstract : This final report summarizes the most important results of the Investigation of Shallow Bulk Acoustic Waves (SBAW) program. This program was conceived on the principle that SBAW technology could lead to devices that are superior to those presently available for frequency filtering and control. The primary objective was to establish whether this technology could provide devices that were as stable as the low frequency bulk wave resonators and yet operate at frequencies higher than the surface acoustic wave devices. The investigations have shown that SBAW devices can be built with excellent temperature stability, low spurious modes and at frequencies higher than those of SAW devices and bulk wave resonators.

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