Investigation of Si–B–C–N coatings produced by ion sputtering of SiBC target

Abstract

Using the method of ion sputtering of sintered Si–B–C targets, amorphous Si–B–C–N thin-film coatings with different nitrogen contents have been prepared. The structures of coatings are studied by the methods of X-ray phase analysis, scanning electron microscopy, glow-discharge optical-emission spectroscopy, infrared spectroscopy, and Raman spectroscopy. The mechanical properties of the obtained coatings are determined using the nanoindentation method. To evaluate the oxidation resistance of the coatings, they are annealed in air at temperatures of 1000, 1100, and 1200°C. It is established that coatings of the optimal composition show a hardness of 26 GPa, an elastic modulus of 221 GPa, and an elastic recovery of 65%. The coatings obtained in the medium consisting of Ar and 15% N2 are oxidation-resistant at temperatures of up to 1200°C owing to the formation of a SiO2-based protective film on their surface.