Abstract
In this article, 3MeV proton irradiation-induced degradation in InP/InGaAs double heterojunction bipolar transistors (DHBTs) is studied, the fluence up to 5×1012protons/cm2, meanwhile 10MeV proton irradiation is investigated in order to compare the differences induced by different proton energy irradiation. The devices exhibit good tolerance up to 5×1011protons/cm2. The concentration of vacancies at different proton fluences can be calculated from SRIM. Being donor-like defects, the In and Ga vacancies act as compensation center while As vacancy acts as an acceptor-like defect. Adding the vacancies model into Sentaurus device simulator, simulation results match well with the trends of measured data.
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