Abstract
Polarization switching processes in ferroelectric capacitors with epitaxial Pb(Zr,Ti)O 3 (PZT) thin films grown on SrRuO 3 /SrTiO 3 (100) were investigated using piezoresponse imaging technique with and on the top electrodes using atomic force microscopy. PZT thin films had only 180° domains because of a tetragonal structure and completely (001)-orientations. Piezoresponse measurements revealed that the polarization switching process changed as the switching pulse voltage increased. At lower switching pulse voltage regions (∼1.4 V c ), the polarization switching occurred from only the latent nuclei. On the other hand, at higher switching pulse voltage (>2 V c ), the new nucleations during switching period were observed. Activation field can be also estimated 310-370 kV/cm.
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