Abstract
Indium-doped tin oxide (ITO) nanorods thin films were fabricated on silicon (100) wafer and commercial thin film coated glass (ITO-G) substrates via ion-assisted electron-beam evaporation system with inclinable and rotatable substrate setup. The thickness was controlled in the range of 100–400 nm through the QCM monitoring. With the fixed substrate's tilted angle at 85°, the film's structures were respectively observed as the slant and vertical nanorods corresponding to the substrate's rotation speed of 0 and 30 rpm by the field-emission scanning electron microscope (FE-SEM). The grazing-incident X-ray diffraction (GIXRD) and photoelectron spectroscopy (PES) were used to analyze the crystallinity and atomic composition of the ITO nanorods films. It was observed that the films were amorphous and non-significant of composition variation relative to the change of the film's-controlled thickness and structure. The optical transmittance in omnidirectional (omni-T) of p- and s-polarized light was determined through the variable-angle UV-VIS-NIR spectrophotometer. We found the different profiles of the omni-T with the change of film's structure and thickness which could be explained through the generated birefringence of the films. In addition, the different results of the p- and s-polarized were also discussed.
Published Version
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