Abstract
Diamond films were deposited on mirror-smooth glass substrates. Two types of pretreatments of glass substrate were performed: scratching with diamond powder and preparation of TiO 2 interlayer. The diamond films were examined with micro-Raman spectroscopy and scanning electron microscopy (SEM). The TiO 2 interlayer treated by hydrogen plasma was analyzed by X-ray photoelectron spectroscopy (XPS). It is found that the TiO 2 interlayer can result in a higher nucleation density and a better adhesion than scratching pretreatment. The enhancement of the nucleation density using TiO 2 interlayer is attributed to the effects of some low valence Ti that was produced by the hydrogen plasma treatment. The observed improvement in film adhesion could be due to the formation of Ti–C chemical bonding between the TiO 2 interlayer and the deposited diamond film as well as good adhesion of the TiO 2 interlayer to the glass substrate.
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