Abstract

Neutron radiation induced defects in neutron-transmutation doped (NTD) silicon containing preexisting electron traps have been investigated by means of high discriminability deep level transient spectroscopy (HDDLTS). The experimental results show that the preexisting defects influence the formation and annealing behavior of neutron radiation-induced defects, and reduce the introduction rates of some radiation defects. Some of the radiation defects and the preexisting defects are suggested to be di- or multi-vacancy complexes.

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