Abstract
In this article, a systematic study was conducted to understand the influences of various synthesis parameters, such as catalyst thickness, catalyst pretreatment time, growth time, reaction gas flow rate, growth temperature, and pressure on the length and quality of carbon nanotubes (CNT) grown by thermal chemical vapor deposition (TCVD). CNT grown on iron deposited silicon oxide substrates were characterized by SEM and Raman spectroscopy. It was found that all of the synthesis parameters studied had an effect on both the length and quality of the CNT. After optimizing the various thermal CVD synthesis parameters, long CNT arrays of up to 380 ¿m could be synthesized for the potential application in multi-level interconnects.
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