Abstract
In this article, a systematic study was conducted to understand the influences of various synthesis parameters, such as catalyst pretreatment time, growth time, growth temperature, reaction gas flow rate on length and quality of the carbon nanotubes grown by thermal chemical vapor deposition (TCVD). Carbon nanotube (CNT) grown on Fe deposited on silicon substrates were characterized by scanning electron microscope and Raman spectroscopy. It was found that all of the synthesis parameters investigated had effects on both length and quality of the carbon nanotube. After optimizing the various thermal chemical vapor deposition synthesis parameters, long carbon nanotube arrays of up to 150 microm in length were successfully synthesized and possess the potential application in multi-level interconnects.
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