Abstract
The optical properties and film quality for a series of high-In composition InGaN films grown on ZnO substrate by metal-organic chemical vapor deposition (MOCVD) are characterized by using high resolution X-ray diffraction (HRXRD), Rutherford backscattering (RBS), X-ray photoelectron spectroscopy (XPS), photoluminescence (PL), and Raman scattering spectroscopy (RSS). The In composition is evaluated by analyzing the RBS and PL emission spectra. The XPS measurements revealed the diffusion of Zn atoms from the substrate into InGaN films. All the analyses of experimental measurements have shown that the growth temperature played an important role in indium composition as well as of film quality. An optimum growth temperature is a necessary condition for obtaining high-quality films.
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