Abstract
This study investigates the effects of TMAH treatment on 5 μm-sized GaN-based Micro LEDs. Compared with untreated GaN Micro LEDs, the optical output power and external quantum efficiency of TMAH treated Micro LEDs are significantly improved. These results can be attributed to the formation of microstructures on the sidewall of Micro LEDs through the TMAH treatment and the effective light reflection is therefore constructed. This research not only improves the characteristics of LEDs, but also paves the way for green and advanced optoelectronic devices.
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