Abstract
Ar cluster ion bombardment has been carried out to study impact processes of cluster ions on solid surfaces with various ion energies. In the case of Ar cluster ion bombardment with an energy of 150 keV, a damaged layer of about 200 Å thickness was formed. This thickness is significantly larger than the value calculated for Ar monomer ions with the same velocity as the cluster ions. The thickness of the damaged layer is strongly dependent on the cluster size. Surprisingly, thicker damaged layers are formed with increasing cluster size, if the cluster ion energies are same. These results strongly suggest a new damage formation mechanism by high-energy cluster ion bombardment.
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