Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron

Abstract

Study of HiPIMS neon plasma produced by the hollow graphite cathode magnetron was carried out. The pressure is 2.66 Pa and average discharge power is up to 490 W. The emission spectra in the UV spectral regions shows strong lines of carbon and neon ions. The dynamics of the intensities of C+ and C lines and their dependency on the discharge power were measured through the side window at a distance of 12 cm from the cathode. Using probe measurements, the plasma parameters inside and outside a hollow cathode magnetron (HCM) with discharge have been determined. The plasma density reaches 1.5 × 1012 cm3 and the electron temperature is 6 eV at a distance of 12 cm. The EEDF shows the presence of electrons with energy up to 32 eV. The goal of this research is to investigate the carbon ionization in the HiPIMS discharge with a HCM.