Abstract
In this paper, we present static and dynamic analysis of an electrostatically actuated imperfect circular microplate under transverse pressure. In modelling of the microplate, we have included both von Kármán geometric and electrostatic force nonlinearities in the development of the equation of motion. The equation of motion has been solved using Galerkin based reduced order modelling technique. The developed reduced order model has been first validated by comparing it with finite element simulation results. Further, the effects of imperfection as initial curvature and uniform transverse pressure have been investigated on the static and dynamic characteristics of the electrostatically actuated circular microplate. We have also investigated the effects of imperfection and applied DC voltage on the pressure sensitivity of the circular microplate. We have found that both imperfection and electrostatic load are responsible for appreciable variations in sensitivity. This detailed investigation is useful to design an imperfect micro pressure sensor.
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