Abstract
Acoustic injection is one of the most dangerous ways of causing micro-electro–mechanical systems (MEMS) failures. In this paper, the failure mechanism of acoustic injection on the microprocessor unit 6050 (MPU6050) accelerometer is investigated by both experiment and simulation. A testing system was built to analyze the performance of the MPU6050 accelerometer under acoustic injection. A MEMS disassembly method was adopted and a MATLAB program was developed to establish the geometric model of MPU6050. Subsequently, a finite element model of MPU6050 was established. Then, the acoustic impacts on the sensor layer of MPU6050 were studied by acoustic–solid coupling simulations. The effects of sound frequencies, pressures and directions were analyzed. Simulation results are well agreed with the experiments which indicate that MPU6050 is most likely to fail under the sounds of 11,566 Hz. The failure mechanism of MPU6050 under acoustic injection is the relative shift of the capacitor flats caused by acoustic–solid resonance that make the sensor detect false signal and output error data. The stress is focused on the center linkage. MPU6050 can be reliable when the sound pressure is lower than 100 dB.
Highlights
During the past thirty years, there have been rapid developments in micro-electro–mechanical systems (MEMS) technology
As a device used for measuring acceleration, the MEMS accelerometer has been widely applied in various industries, especially in the civil fields, such as mobile phones [2], civilian drones [3] and intelligent hand rings [4]
MEMS accelerometer becomes indispensable because it has the advantages of small size, extreme ruggedness, low power consumption and low price [5]
Summary
During the past thirty years, there have been rapid developments in micro-electro–mechanical systems (MEMS) technology. Pradeep et al studied the reliability of MEMS accelerometer in mechanical shocks by modeling simulations [12]. Tu et al adopted Kriging approximation and probabilistic algorithms method with finite element simulations to study the effect of input uncertainties on the response of the MEMS structure [13]. The microprocessor unit 6050 (MPU6050) is the research object in this paper It is the first six-axis motion tracking device in the world which is composed of a three-axis accelerometer and a three-axis gyroscope [19]. Acoustic injection experiments were conducted, and acoustic-solid coupling simulations were performed to study the invalidation mechanism of the MPU6050 accelerometer. A multi-physics coupling finite element simulation was performed to analyze the stress and the micro deformation of MPU6050 under different sound pressures, frequencies and directions
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