Investigation of a multigigahertz MOSFET amplifier with an on-chip inductor fabricated on a SIMOX wafer

Abstract

This paper describes a technology that can be used to integrate multigigahertz RF circuits into large-scale digital circuits. Spiral inductors and a MOSFET amplifier with an inductive load were fabricated on a SIMOX wafer in order to demonstrate the feasibility of SOI technology. With a 1-V supply voltage, peaking of the amplifier gain was observed, as expected from circuit simulations, at 1-4 GHz. These results show that RF circuits with inductors can be implemented on a SIMOX wafer by using the conventional digital CMOS LSI process.