Abstract
Abstract. This article presents a new metrological atomic force microscope (MAFM) head with a new beam alignment and a combined one-beam detection of the cantilever deflection. An interferometric measurement system is used for the determination of the position of the cantilever, while a quadrant photodiode measures the bending and torsion of the cantilever. To improve the signal quality and reduce disturbing interferences, the optical design was revised in comparison to the systems of others (Dorozhovets et al., 2006; Balzer et al., 2011; Hausotte et al., 2012). The integration of the MAFM head in a nanomeasuring machine (NMM-1) offers the possibility of large-scale measurements over a range of 25mm×25mm×5 mm with sub-nanometre resolution. A large number of measurements have been performed by this MAFM head in combination with the NMM-1. This paper presents examples of the measurements for the determination of step height and pitch and areal measurement.
Highlights
Nowadays, decreasing structural sizes, feature miniaturization and, at the same time, increasing component dimensions characterize the measurement tasks for micro- and nanomeasuring systems
In order to adapt our measuring system for atomic force microscope (AFM) measurements, a focus lens and two tiltable plane mirrors are used to adjust the direction of the focused laser beam and the position of the focus
This paper presents the design and the implementation of the metrological atomic force microscope (MAFM), as well as measurements of step height and pitch and areal measurement
Summary
Nowadays, decreasing structural sizes, feature miniaturization and, at the same time, increasing component dimensions characterize the measurement tasks for micro- and nanomeasuring systems. Due to the optical design of the old system, disturbing interferences on the PSD appeared, which were caused by reflections on the quarter wave plate of the measuring arm (Balzer et al, 2011). For this reason, the optical system has been revised, and the AFM head has been newly designed and manufactured. In order to adapt our measuring system for AFM measurements, a focus lens and two tiltable plane mirrors are used to adjust the direction of the focused laser beam and the position of the focus. This paper presents the design and the implementation of the MAFM, as well as measurements of step height and pitch and areal measurement
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