Abstract
A new metrological atomic force microscope (MAFM) with combined deflection detection system that comprises a homodyne interferometer and an optical beam deflection measuring system are presented. The combination allows the simultaneous three-dimensional detection of position, bending and torsion of the cantilever. Two wedge plates with a wedge angle of 0.5° have been integrated to reduce the disturbing interferences. The new measuring system uses two tiltable plane mirrors and a shiftable focus lens to adjust the direction of the focused laser beam and the position of the focus. The integration of the MAFM head in a nanomeasuring machine (NMM-1) creates the possibility of traceable dimensional measurements over a large range of 25 mm × 25 mm × 5 mm with sub-nanometre resolution. This paper introduces its setup, realisation and metrological properties, such as stability of the characteristic curves, noise level and combined measurement uncertainty. Finally, exemplary measurement results are presented.
Highlights
Scanning probe microscopy (SPM) is widely used in nanotechnology and electronics
This paper deals with the functional principle, metrological properties and the calibration of a metrological atomic force microscope (MAFM) with combined deflection detection system that comprises a homodyne interferometer and a optical beam deflection measuring system
This paper deals with a new metrological atomic force microscope
Summary
Scanning probe microscopy (SPM) is widely used in nanotechnology and electronics. According to the nature of interaction between probe and sample SPMs can be distinguished in different groups, e.g. the scanning tunneling microscope, the atomic force microscope (AFM) or the scanning near-field optical microscope (SNOM). Decreasing structural sizes and feature miniaturisation with concurrent increasing component dimensions characterise the measurement tasks for micro- and nanomeasuring systems Advances in those areas require quantitative dimensional measurements with nanometre accuracy as well as measurements over large measuring ranges. The traceable measurement with the practice-oriented working areas for microcomponents is only possible by combining the AFM sensors with large-range scan stages or nano coordinate measuring devices. In this way, both the requirements of nanometrology and the mesoscale measuring range can be achieved. This paper deals with the functional principle, metrological properties and the calibration of a metrological atomic force microscope (MAFM) with combined deflection detection system that comprises a homodyne interferometer and a optical beam deflection measuring system. The uncertainty of measurements is analysed and examples of measurements are illustrated
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