Investigation and progress about micro plasma source of optical spectrometer

Abstract

This paper introduces several micro optical spectrometer source based on micro electro mechanical system(MEMS) technology. Firstly, it introduces a MEMS based microfabricated inductively coupled plasma(ICP) source whose structure mainly consists of a planar spiral-shaped coil with diameter of 5 mm and a planar interdigitated resonance capacitor, with the RF excitation power of a frequency of 450 MHz and a power efficiency of 3 W, the argon can be ionized to plasma in the pressure of 100 Pa. Secondly, it presents a PCB based Micro ICP Source designed by author. When the pressure is 100 Pa and the RF power is 3.5 W, 13.56 MHz, the novel ICP is ignited. Thirdly, it also describes a microwave induced plasma (MIP) source, whose main structure is a split-ring resonator. The device is sufficient to initiate a plasma from air excitated with a frequency of 895 MHz and a power efficiency of 3 W in atmospheric pressure air. Finally, it presents the application of micro generator.