A Study of Mach–Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer

Abstract

A novel Mach–Zehnder interferometer (MZI)-type optical modulator based on micro electro mechanical systems (MEMS) technology is developed in this study. In this optical modulator, one of two branched waveguides in the MZI has a floating beam structure (air-bridge type). Additionally, a cantilever supporting a proof mass intersects with the floating optical waveguide. When an inertial force due to acceleration is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. Therefore, this optical modulator will be applicable to an accelerometer in the future. To decrease optical loss at the intersectional point between the floating waveguide and the cantilever in the MZI, the multi-mode interference (MMI) waveguide is serially connected with the floating waveguide and the cantilever crosses to the MMI waveguide. An optimization of the MMI waveguide and an estimation of deflection of the floating waveguide due to applying force are carried out by using optical and mechanical simulation, respectively. The proposed optical modulator is fabricated by inductively coupled plasma (ICP) etching of the top layer of a silicon-on-insulator (SOI) wafer, which is made of crystal Si. The floating waveguide in the modulator is formed by removal of its underlying buried oxide (BOX) layer of SOI. As a result of evaluation, we have succeeded in changing the output of the MZI by applying a force to the cantilever. However, the modulation is smaller than the expected value. Improvement of the modulation and detection of the inertial force due to the applied acceleration are future tasks.