Abstract
High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with an integrated silicon tip and one with a diamond tip glued to the end of the cantilever. The result indicates that the microprobe with the silicon tip has high trackability for measurements up to traverse speeds of 10 mm/s, while the resonant response of the microprobe with diamond tip needs to be improved for the application in high-speed topography measurements.
Highlights
Sensors 2021, 21, 1557. https://Surface roughness plays a great role in diverse fields, such as semiconductor technology, automotive manufacturing, and medicine engineering
Since undesired silicon tip abrasion exists in measurements, a diamond tip with a tip radius of 2 μm was glued to the microprobe to replace the silicon tip, as defined in DIN EN
The “tip flight” test results demonstrate that the dynamics of both microprobes are high enough for the measurements at the speed of 10 mm/s, but the bandwidth of the microprobe with a diamond tip should be raised to meet the demand of trackability
Summary
Surface roughness plays a great role in diverse fields, such as semiconductor technology, automotive manufacturing, and medicine engineering. When that the stylus probe will lose contact to the surface and profile fidelity as it moves the speed is below 500 μm/s, the roughness measurement results are stable. No loss ofvariation tracking in andthe signal fidelity at high traverse above is further a sharp results happens This pointsspeeds out that an mm/s is a hard requirement for stylus probes. Since the limited tracking fidelity noticed first steep features, we investigate th is examined, the resonant frequencies of the is microprobes are at analyzed and measured, and proof-of-principle performed and detailed. We focus the influence oftracks the frequency components passing through the low pass filter formed by the tip, it can b dynamic behavior of the microprobe. The steepest feature on the surface should vary slower than the tip trajectory, oth dynamics of the cantilever erwise, the tracking willare behigh lost.enough for the measurement
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