Abstract
Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.
Highlights
With the advantages of miniaturized size and high sensitivity, the silicon-based cantilever has become an important sensor [1,2]
Surface roughness measurements allow us to predict the performance of a mechanical component, and they play an important role in component quality determination [3,4]
Because the microprobe tip can become blunt and flat during roughness measurements, the structure width method was chosen for our tip geometry evaluation
Summary
The rectangular structure ture isthe one the most used features tip tocharacteriz is one of mostof commonly used commonly features in tip characterization It can in be used map the tip outline and characterize both the tip radius and the opening angle. The measured profile is feature the trace ofare the tip apex (thethe dashed line), and the tip procedure at different gular groove similar, characterizing is positions is drawn with dotted lines (Figure 5a). The rectangular groove feature, both ridge edges A and B are deter the 2D tip form is drawn by first selecting the segment between edges A and B fr measured profile (Figure 5c), switching the segment parts on either side of the li pendicular to the lowest point, and overlapping the A and B edges to acqu tip geometry (Figure 5d). A and B from the measured profile and switching the segment parts on either side the line perpendicular to the lowest point; overlapping edges and reconstructing the pendicular to the lowest point; (d) overlapping edges A and B and reconstructing the tip ge tip geometry
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