Abstract

The crystallography and atomic structure of inversion twin boundaries were studied in polycrystalline ZnO using conventional transmission electron microscopy and high‐resolution electron microscopy. Inversion twin boundaries. In order to determine the atomic structure of the inversion twin boundary, high‐resolution transmission electron images were compared with simulated images. The atomic structure of the inversion boundary was determined to have a head‐to‐head configuration and its stacking sequence is AαBβAα‐ATCαA, where A, B, and C are Zn atomic planes and α, β, and T are O planes. A slight contraction of the planes in the boundary region is detected.

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