Abstract

PROPHESY, a technique for the reconstruction of surface-depth profiles from X-ray photoelectron spectroscopy data, is introduced. The inversion methodology is based on a Bayesian framework and primal-dual convex optimization. The acquisition model is developed for several geometries representing different sample types: plane (bulk sample), cylinder (liquid microjet) and sphere (droplet). The methodology is tested and characterized with respect to simulated data as a proof of concept. Possible limitations of the method due to uncertainty in the attenuation length of the photo-emitted electron are illustrated.

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