Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Abstract

Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five corner coupled square plate MEMS resonators with a natural frequency close to 0.85 MHz. The method is also capable of characterizing the fabrication process and important sensor parameters such as the spring constant and coupling ratio.