Abstract

In this work we analyze and characterize a suspended polysilicion double-clamped beam array as an innovative platform for biosensing applications based on the high sensitivity of micromechanical resonators. The thermal noise response of the array of hollow microbridge resonators (HMB) was sequentially detected by means of a custom scanning optical free space interferometer. The results demonstrated that the microbridges operate at resonant frequencies around 850 KHz with quality factors and spring constants up to 280 and 3514 N/m, respectively. Furthermore, when filled with distilled water, no significant changes in the quality factor were noticeable and the spectral measurements depicted a frequency shift of 20 KHz. We contend that the HMB integrated system is capable of sensing different species based on the spectral frequency response of the overall array of resonators.

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