Introduction to Imaging Techniques in the HIM

Abstract

The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This chapter serves as an introduction to imaging with the HIM and explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including high resolution secondary electron imaging, backscattered ion imaging, ionoluminescence imaging and imaging with transmitted or reflected ions. Key concepts such as ion channeling, charge neutralization and utilizing the large depth of field are introduced, setting the scene for the subsequent chapters in this section that focus on particular aspects of HIM imaging.