Abstract
Recently, both far ultraviolet (FUV) and deep UV (DUV) spectroscopies have received keen interest as new spectroscopies because they offer novel possibilities for studying electronic structure and transition, selective molecular imaging, high resolution microscopy, as well as applications for photoelectric devices. In this chapter after brief history of UV light, UV, FUV, and DUV regions are defined. Then, principles and brief history of FUV spectroscopy are described, followed by the discussion of its characteristics and advantages. Recent progress in FUV spectroscopy is also introduced. In the second part of this chapter, principles, methods, and recent progress of DUV spectroscopy are mentioned. Finally, the characteristics of FUV and DUV spectroscopies are compared.
Published Version
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