Abstract
Usage of planar microcoils in nuclear magnetic resonance (NMR) analysis of volume-limited chemical and biological samples has been widespread over the decades, since these microcoils obtain high sensitivity and resolution in localized units of volume. On the other hand, low-temperature co-fired ceramic (LTCC) materials exhibit highly reliable and advantageous properties in the radio frequency (RF) working area. In this work, author tries to incorporate this prosperous material technology in to design of high quality NMR microcoils, which were so far fabricated on the glass or polymer substrates. Set of few ceramic substrate microcoils is fabricated and characterized with detailed description of fabrication process in this paper.
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