Abstract

Design and fabrication of radio frequency (RF) inductors in multi-layer Low Temperature Co-fired Ceramic (LTCC) materials are discussed and experimental results are presented. Compact high-Q three-dimensional inductor topologies have been designed to achieve high quality factor (Q>75) and high self-resonance frequency (SRF > 4.5 GHz) with inductance-value between 2–7 nH at 2 GHz. The inductors were made using the lowest possible number of LTCC layers and fine line LTCC process (width/space 2 mil/2 mil). The fabricated LTCC inductors are suitable for RF system-on-package (SiP) applications that require high Q factors.

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