Intrinsic stress in diamond-like carbon films and its dependence on deposition parameters

Abstract

The compressive stresses and the hydrogen content inside diamond-like carbon films were measured for various deposition conditions. Four methods of film deposition were tested: primary beam containing CH 4; primary beam containing CH 4 with simultaneous bombardment of second beam of energetic argon ions; primary beam containing C 4H 10, and sputter deposition of graphite with the addition of hydrogen gas. The compressive stresses in the films were attributed mainly to the bombarding energy of the ion beam. An additional contribution to the compressive stresses probably came from the complex species in the discharge. The contribution of the hydrogen to the stresses in the films did not seem to be obvious.