Abstract
A simulation was conducted to research the unsteady flow properties of the valveless piezoelectric micropump with diffusion/nozzle tube at different angles in the case of various driving frequencies using CFX software in this study. The purpose was to obtain the factors that affect the performance of the micropump under unsteady conditions. The results show that the rate of flow of the valveless piezoelectric micropump with different diffusion angles increases with the increase of frequency. The micropump with a diffusion angle of 10° has the best performance and the maximum rate of flow within the frequency range of 100 Hz~500 Hz, and the efficiency of the micropump can be reached 16.98%. The vortex motion generated due to flow separation has a notable effect on the performance of the micropump.
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