Drive simulation analysis of piezoelectric valveless micropump based on ZnO nanorod array

Abstract

In this paper, ZnO nanorods are combined with the driving mechanism of a piezoelectric micropump to design a valveless piezoelectric micropump. The ZnO nanorods were prepared by the magnetron sputtering method to grow the ZnO seed crystal layer on the silicon surface and then by hydrothermal method. The growth of ZnO nanorods under different solution concentrations, solution temperatures, and growth times was investigated, and analytical methods for analyzing the surface morphology and elemental content of ZnO nanorods. Then, the simulation of the valveless micropump using ZnO nanorods prepared under optimal conditions as piezoelectric oscillators were carried out using COMSOL finite element analysis software, and the maximum output flow rate of about 14.40 μL/s was achieved at 100 V50 Hz.