Abstract
The internal leakage between resonator elements in capacitive ultrasonic transducers with V-grooved backplates has been studied. The phenomenon is modelled and simulated using the lumped parameter method. The model can be used to explain signal vanishing at certain frequencies in capacitive ultrasonic transducers using multiple-sized resonators, i.e., cavities in the transducer backplate. The internal leakage together with multiple-sized cavities can be used to increase the frequency band of the capacitive ultrasonic transducer.
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