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https://doi.org/10.1088/0957-0233/24/6/067001
Copy DOIJournal: Measurement Science and Technology | Publication Date: May 3, 2013 |
Citations: 3 | License type: iop-standard |
We present a combined interferometric arrangement designed for measurement of one-axis displacement over a specified measuring range with mechanical referencing. This concept allows simultaneous measurement of the carriage position from both sides together with monitoring of the overall range. This can be used in configuration with in-line monitoring of the fluctuations of the refractive index-–tracking refractometry. Similarly, the wavelength of the laser source can be stabilized over the measuring range, effectively compensating for the refractive index changes. Otherwise, monitoring of length of the measuring range can give information about the thermal dilatation effects of frame of the whole measuring setup. This technique can find its way into high-precision positioning systems in nanometrology.
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