Abstract

We present results of numerical simulation performed with the aim to study the possibility of measuring subnanometer-range roughness parameters using an automated interference Linnik microscope with a white-light source. It is shown that reconstruction noises of phase images can be reduced to 0.1 nm when using averaging of interferograms and phase images.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call