Abstract
SrBi2Ta2O9 (SBT) films were deposited on Pt/TiO2/SiO2/Si (100) substrates by metalorganic deposition and pulsed laser deposition. Interfacial structures between SBT films and Pt electrodes (both top and bottom) were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and high-resolution transmission electron microscopy (HRTEM). The structural defects such as stacking faults were revealed by HRTEM image of SBT films with 10 mol% excess bismuth prepared by MOD. The stacking faults were examined as structural defects with extra inserted Bi-O planes normal to the c axis. The relationships between the ferroelectric properties and interfacial structures, and structural defects are discussed.
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