Abstract
Diamond-like carbon (DLC) has been of interest as a promising coating for protection and insulating layer in micro-electromechanical systems due to high hardness, wear resistance, transparency in IR range, chemical inertness and biocompatibility. The interfacial effect on thermal transport is studied for DLC films deposited on Al2O3 substrates with an ion gun method. Thermal conductivity of DLC thin films is measured with a 3ω method. DLC films show the thickness-dependent thermal conductivity, which is understood with the interfacial thermal resistance between DLC thin film and Al2O3 substrate. The interfacial thermal resistance and thermal conductivity of bulk DLC are determined with the measured thickness-dependent thermal conductivity of DLC films.
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