Abstract
Gadolinium zirconium oxide (Gd2Zr2O7) films and diamond-like carbon (DLC) films were prepared by RF-magnetron sputtering and an ion gun method, respectively. To study the thermal conductivity of these films, we used the 3ω and time-domain thermoreflectance (TDTR) methods. The thermal conductivity showed a film thickness dependence for the 3ω method, and this dependence is described as an interfacial effect by considering heat penetration depth in the measurement. The obtained thermal conductivities of the Gd2Zr2O7 and DLC films, independent of the interfacial effect, are 1.6 and 2.5 W m-1 K-1, respectively. The thermal conductivity of the Gd2Zr2O7 films showed no significant thickness dependence for the TDTR method. The conductivities of Gd2Zr2O7 1.6–1.8 W m-1 K-1 obtained by the TDTR method were close to the thermal conductivity of the Gd2Zr2O7 films, independent of the interfacial thermal effect observed in the 3ω method.
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