Abstract

A metal–oxide–semiconductor (MOS) structure or a forward-biased pn junction with an interdigitated structure has been investigated for light-emitting devices using the standard Si complementary metal-oxide-semiconductor (CMOS) process. Current hysteresis is observed to be associated with the reduction of light emission in the MOS structure. An oxide trap level of 1.1±0.1 eV is found and contributes to Frenkel–Poole conduction in the high-current region. Furthermore, traps at the interface between silicon and oxide are believed to be responsible for light emission in both MOS structure and pn junction diodes.

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