Abstract
The microstructure of a Cr buffer layer between a stainless steel (SS) layer, which is a catalytic layer for carbon nanotube growth, and a Si (100) substrate was investigated by high-resolution transmission electron microscopy. The SS film is polycrystalline, and the thickness is not uniform. It was partly covered by a surface Cr2O3 layer. The Cr buffer layer reacted with the Si substrate to form CrSi2. Definite orientation relationships (ORs) between CrSi2 and Si were observed: (OR D) and (OR A). OR D is a new OR found in the CrSi2/Si system. We also found several other new ORs which are similar to OR A and are denoted OR E, OR F, OR G, and OR H. For OR E and OR F, the CrSi2 crystals are rotated, respectively, about 18° and 34° counterclockwise around the zone axis with respect to OR A. For OR G and OR H, the CrSi2 crystals are rotated, respectively, about 35° and 107° clockwise around the zone axis with respect to OR A. These findings not only enrich the crystallography of the CrSi2/Si epitaxial system, but also provide new insight into the role of the Cr buffer layer in the growth of carbon nanotubes.
Published Version
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