Abstract
Transmission electron microscopy (TEM) techniques are applied to characterize the interfaces of epitaxial III–V semiconductor heterostructures with high spatial resolution and to analyze compositional variations at interfaces. As expected, realistic interfaces of compound semiconductors are not chemically sharp but there is a transition region at the interface. The functional dependence of the smooth change in composition is sigmoidal and can be described using an analytical expression, thus enabling a quantitative characterization of the interface width. The model gives a very good description of the distribution profiles and applies to several material systems, including the interfaces of As-based alloys and those of the non-common-atom InAs/GaSb short-period superlattices. The analysis of (Ga,In)(N,As)/GaAs quantum wells reveals that there is a connection between the interface properties in this material system and the miscibility gap of the alloy.
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