Abstract
Multilayer interference structures (X-ray mirrors) based on the alternating layers of Mo/Si and W/Si were investigated using laboratory X-ray micro-fluorescence analysis (micro-XFA) and statistical analysis. The physics of interaction processes of primary X-ray radiation scattered on the surface of multilayer periodic structures have been studied. Using the X-ray spectroscopy together with the mathematical methods of statistics made it possible to evaluate a degree of homogeneity and to compare the chemical compositions of different samples of the multilayer mirrors. A correlation between the statistical characteristics of bimodal frequency distribution and the reflectivity properties of X-ray mirrors for the scattered radiation has been revealed. The frequency distributions of mathematical statistics for experimentally collected intensities of the scattered Rh Kα radiation indicate the depth heterogeneity of the studied samples. Used in this work approach gives a new strategy for testing to improve of efficiency of X-ray mirrors based on the multilayer nanoscale structures.
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