Abstract
This paper describes a new implementation of a CMOS electrothermal frequency-locked-loop (FLL), whose output frequency is determined by the temperature-dependent phase shift of an electrothermal filter (ETF). The FLL maintains a constant phase shift in the ETF, and as a result drives it with a signal whose frequency is a well-defined function of temperature. Compared to a previous implementation, the FLL described here has significantly more loop gain, less electrical phase-spread, and is more suitable for full integration. Measurements on 16 samples (from one batch) show that the temperature dependence of the FLL's output frequency agrees very well with the known thermal properties of bulk silicon. The untrimmed spread of this frequency is less than plusmn0.45% (3sigma) from -40degC to 100degC, which corresponds to a temperature-sensing inaccuracy of less than plusmn0.7degC (3sigma).
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