Abstract

We propose a novel application of carbon nanotubes as a wiring materials for self-assembling nano-interconnections. We investigated nanotube growth on patterned silicon substrates as a model for interconnectional growth. The growth was performed by methane chemical vapour deposition with an iron-oxide nanoparticle catalyst. Nanotubes originating from the top of a mesa grew laterally, bridging one mesa after another. A nanotube network was seen among an array of mesas. These results demonstrate the possibility of self-assembled wiring.

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